Mercury Prober CV/IV Measurement System
Mercury Prober CV/IV Measurement System
This is a CV/IV measurement system using a mercury probe method developed by Four Dimensions, Inc. in the United States, which excels in reproducibility and safety. It can measure the characteristics of various wafers such as Si, compounds, SOI, and bulk. 【Features】 ◆ No need for electrode fabrication. Since mercury itself serves as the electrode, the costly and time-consuming patterning process is unnecessary. Measurements can be taken in a bulk state or with an insulating film formed. ◆ Automatic system. It allows for automatic mapping measurements of up to 49 designated measurement sites, including C-V, I-V characteristics, TDDB, Vdb, Qbd for oxide breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, etc. ◆ High measurement reproducibility. Excellent measurement reproducibility is achieved through a uniquely designed mercury probe area and the use of fresh mercury for each measurement. ◆ Compact structure. Integrates CV and IV meters, transport platform, and probe section. ◆ Compatible with various wafers and chips. Capable of measuring 1 to 12-inch wafers and chip-sized samples.
- 企業：雄山 東京支店
- 価格：Other
